Sensor having a thin film element

US6101872A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Martin Zechnall · Schwieberdingen, DE
• Christoph Treutler · Wannweil, DE
• Manfred Lembke · Gerlingen, DE
• Hans Hecht · Stuttgart, DE
• Jiri Marek · Reutlingen, DE
• Herbert Goebel · Gräfelfing, DE
• Martin Willmann · Reutlingen, DE
• Hans-Ulrich Gruber · Gerlingen, DE
• Andreas Lock · Reutlingen, DE
• Klaus Heyers · Reutlingen, DE
• Joerg BUTH · Gerlingen, DE

Key dates

• Filing date: Mar 9, 1998
• Grant date: Aug 15, 2000
• Expiry date: Mar 9, 2018

Classification

• Technology area (CPC G): Physics
• CPC primary: G01K7/183
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A sensor has a thin film element, the thin film element having a temperature-dependent electrical resistance. The thin film element includes a platinum layer, which is doped with zircon or zircon oxide. The thin film element can be arranged on a membrane to create a mass airflow sensor.