System for processing substrates
US6103055A · kind A · utility
24Cited by
56References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 14, 1995 |
| Grant date | Aug 15, 2000 |
| Priority date | — |
| Expiry date | Jul 14, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67745
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate processing system is provided that includes substrate processing vessels, a substrate queuing station, a substrate transfer device, and a processor. The processor, in communication with the processing vessels, the queuing station, and the transfer device, provides selectable single and multi-step processing of the substrates by accessing a process command for a given substrate corresponding to desired processing of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.