Chamber design with isolation valve to preserve vacuum during maintenance
US6103069A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 31, 1997 |
| Grant date | Aug 15, 2000 |
| Priority date | — |
| Expiry date | Mar 31, 2017 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/564
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention provides a vacuum chamber that reduces the amount of time required to draw a vacuum after replacing consumables or performing routine maintenance by preserving the vacuum in a portion of the chamber. More particularly, the chamber isolates a frequently replaced consumable or component in a first portion of the chamber so that only the first portion of the chamber is exposed to the surrounding environment and the volume of gas or air that must be re-evacuated is reduced. A gate valve is provided to form a seal with a valve seat that is either formed into the chamber wall or provided by a valve body. Once the second portion is sealed, a lid to the first portion may be opened for access.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.