Inventor · Inver Grove Heights, MN, US

Robert E. Davenport

23Patents
16h-index
26Co-inventors
81Inventor score

Filing activity: Dec 31, 1992 → Jan 17, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US5803977A Apparatus for full wafer deposition Chemistry; Metallurgy 84 Expired
US6450750B1 Multiple loadlock system Emerging Cross-Sectional Technologies 41 Expired
US9873180B2 CMP pad construction with composite material properties using additive manufacturing processes Performing Operations; Transporting 37 Active
US5460703A Low thermal expansion clamping mechanism Chemistry; Metallurgy 31 Expired
US6034000A Multiple loadlock system Emerging Cross-Sectional Technologies 31 Expired
US5511799A Sealing device useful in semiconductor processing apparatus for bridging materials having a thermal expansion differential Emerging Cross-Sectional Technologies 23 Expired
USD361086S Roll-on box sealing hand applicator General 23 Expired
US5982986A Apparatus and method for rotationally aligning and degassing semiconductor substrate within single vacuum chamber Electricity 23 Expired
US5792310A Roll-on box sealing hand applicator Emerging Cross-Sectional Technologies 22 Expired
US10384330B2 Polishing pads produced by an additive manufacturing process Performing Operations; Transporting 20 Active
US5735339A Semiconductor processing apparatus for promoting heat transfer between isolated volumes Emerging Cross-Sectional Technologies 19 Expired
US6103069A Chamber design with isolation valve to preserve vacuum during maintenance Chemistry; Metallurgy 19 Expired
US5673167A Support platen with removable insert useful in semiconductor processing apparatus Emerging Cross-Sectional Technologies 17 Expired
US10821573B2 Polishing pads produced by an additive manufacturing process Performing Operations; Transporting 16 Active
US10875145B2 Polishing pads produced by an additive manufacturing process Performing Operations; Transporting 16 Active
US10537974B2 CMP pad construction with composite material properties using additive manufacturing processes Performing Operations; Transporting 16 Active
US6241477A In-situ getter in process cavity of processing chamber Chemistry; Metallurgy 14 Expired
US5305728A Bow sight apparatus Mechanical Engineering; Lighting; Heating 7 Expired
US5507499A Method of sealing useful in semiconductor processing apparatus for bridging materials having a thermal expansion differential Emerging Cross-Sectional Technologies 6 Expired
US6506693B2 Multiple loadlock system Emerging Cross-Sectional Technologies 5 Expired
US6222991A Method for rotationally aligning and degassing semiconductor substrate within single vacuum chamber Electricity 5 Expired
US6509069B1 Method of reducing the cleaning requirements of a dielectric chuck surface Emerging Cross-Sectional Technologies 2 Expired
US11958162B2 CMP pad construction with composite material properties using additive manufacturing processes Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.