Apparatus including integral actuator with control for automated calibration of temperature sensors in rapid thermal processing equipment
US6106148A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 25, 1999 |
| Grant date | Aug 22, 2000 |
| Priority date | — |
| Expiry date | Jun 25, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K15/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention presents an automatic calibration system and method for calibration of a substrate temperature sensor in a thermal processing equipment, such as a rapid thermal processing system. The calibration system includes a temperature-sensitive probe associated with the substrate temperature sensor to calibrate the substrate temperature sensor and an actuator to position the temperature-sensitive probe relative to the substrate during a calibration cycle. The actuator and temperature-sensitive probe of the automatic calibration system can be incorporated into the thermal processing equipment in order to maintain the thermal processing equipment cleanliness and integrity during a calibration cycle, and to allow rapid automated calibration. In the preferred embodiment of this invention, the temperature-sensitive probe and its actuator are implemented in the gas showerhead assembly of a rapid thermal processing system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.