Patent assignee · US · COMPANY

CVC, Inc.

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9Patents
0Active
9Granted
30Portfolio score

Filing activity: Jul 10, 1996 → Mar 3, 2000

Most-cited patents

PatentTitleAreaCited byStatus
US6016000A Ultra high-speed chip semiconductor integrated circuit interconnect structure and fabrication method using free-space dielectrics Electricity 178 Expired
US6124198A Ultra high-speed chip interconnect using free-space dielectrics Electricity 106 Expired
US5846883A Method for multi-zone high-density inductively-coupled plasma generation Electricity 94 Expired
US5871588A Programmable ultraclean electromagnetic substrate rotation apparatus and method for microelectronics manufacturing equipment Chemistry; Metallurgy 39 Expired
US6221217A Physical vapor deposition system having reduced thickness backing plate Electricity 31 Expired
US5876573A High magnetic flux cathode apparatus and method for high productivity physical-vapor deposition Electricity 31 Expired
US6108490A Multizone illuminator for rapid thermal processing with improved spatial resolution Electricity 21 Expired
US6167195A Multizone illuminator for rapid thermal processing with improved spatial resolution Electricity 16 Expired
US6106148A Apparatus including integral actuator with control for automated calibration of temperature sensors in rapid thermal processing equipment Physics 12 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.