Dual resolution combined laser spot scanning and area imaging inspection
US6122046A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Oct 2, 1998 |
| Grant date | Sep 19, 2000 |
| Priority date | — |
| Expiry date | Oct 2, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical inspection system for inspecting a substrate includes a light detector, a light source, a deflection system, an objective lens and an optical system. The light source produces an illuminating beam directed along a path to the substrate. The deflection system scans the illuminating beam on a scan line of the substrate. The objective lens focuses the illuminating beam on the substrate and coliects light reflected therefrom. The collected beam is angularly wider than the illuminating beam. The optical system directs the collected light beam along a path at least partially different than the path of the illuminating beam and focuses the collected beam on the light detector. In one embodiment, the system additionally includes at least one dark field detector for collecting light deflected from the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.