Patent · US Expired

Micromachined chip scale package

US6124634A · kind A · utility

229Cited by
19References
30Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 17, 1998
Grant dateSep 26, 2000
Priority date
Expiry dateSep 17, 2018

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/19043
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A chip scale package comprised of a semiconductor die having a silicon blank laminated to its active surface. The bond pads of the die are accessed through apertures micromachined through the blank. The package may be employed with wire bonds, or solder or other conductive bumps may be placed in the blank apertures for flip-chip applications. Further, the package may be employed to reroute external connections of the die to other locations, such as a centralized ball grid array or in an edge-connect arrangement for direct or discrete die connect (DDC) to a carrier. It is preferred that the chip scale package be formed at the wafer level, as one of a multitude of packages so formed with a wafer-level blank, and that the entire wafer be burned-in and tested to identify the known good die (KGD) before the wafer laminate is separated into individual packages.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.