Manufacturing method for electrostatic deflector
US6125522A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Nov 12, 1996 |
| Grant date | Oct 3, 2000 |
| Priority date | — |
| Expiry date | Nov 12, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49895
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Methods are disclosed for manufacturing an electrostatic deflector comprising multiple electrodes. The electrostatic deflector is of a type not tending to generate large eddy currents during use. The electrodes are arranged as electrode-members relative to each other in a desired angular relationship with high precision around an optical axis. Each electrode is formed by adhering a conductive film to portions of the surface of an insulative electrode-member material except an outer surface of the electrode-member, and a conductive film is adhered to at least some of the inner surface of an insulating outer casing. The electrode-members are inserted into respective grooves in a jig; then the outer surface of each electrode-member is attached to the inner surface of the outer casing. Lead wires can be attached to the electrodes, and the jig is removed by dissolution or melting.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.