Gas supplementation method of excimer laser apparatus
US6130904A · kind A · utility
29Cited by
4References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 20, 1996 |
| Grant date | Oct 10, 2000 |
| Priority date | — |
| Expiry date | Jun 20, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/134
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In an excimer laser apparatus in which halogen gas, rare gas and buffer gas are fed into the laser chamber, before laser oscillation, the oscillation stop time is calculated, and, if the calculated oscillation stop time exceeds a prescribed time, the calculated oscillation stop time is used to calculate a feeding amount of mixed gas comprising rare gas or buffer gas, and the mixed gas is fed, prior to laser oscillation, in the calculated feeding amount; stable laser output is thereby obtained from the initial period of laser oscillation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.