Junichi Fujimoto
32Patents
7h-index
56Co-inventors
72Inventor score
Filing activity: Jun 2, 1980 → Aug 10, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5450436A | Laser gas replenishing apparatus and method in excimer laser system | Electricity | 89 | Expired |
| US4829536A | Multi-mode narrow-band oscillation excimer laser | Electricity | 77 | Expired |
| US5895549A | Method and apparatus for etching film layers on large substrates | Emerging Cross-Sectional Technologies | 38 | Expired |
| US6130904A | Gas supplementation method of excimer laser apparatus | Electricity | 29 | Expired |
| US5373523A | Excimer laser apparatus | Electricity | 28 | Expired |
| US6810061B2 | Discharge electrode and discharge electrode manufacturing method | Electricity | 16 | Expired |
| US5291509A | Gas laser apparatus | Mechanical Engineering; Lighting; Heating | 11 | Expired |
| US5011711A | Method for post-treatment of electroplated steel sheets for soldering | Performing Operations; Transporting | 5 | Expired |
| US5639515A | Method for post-treatment of plated steel sheet for soldering | Chemistry; Metallurgy | 4 | Expired |
| US5663977A | Gas laser apparatus | Electricity | 3 | Expired |
| US7984539B2 | Chamber replacing method | Emerging Cross-Sectional Technologies | 2 | Active |
| US9055657B2 | Extreme ultraviolet light generation by polarized laser beam | Electricity | 1 | Active |
| US8611393B2 | Laser apparatus | Electricity | 1 | Active |
| US8884257B2 | Chamber apparatus and extreme ultraviolet light generation system | Physics | 1 | Active |
| US9748727B2 | Preliminary ionization discharge device and laser apparatus | Electricity | 1 | Active |
| US4353600A | Non-linkage type load sensing valve | Performing Operations; Transporting | 1 | Expired |
| US9059554B2 | Discharge-pumped gas laser device | Electricity | 1 | Active |
| US12347995B2 | Chamber device, gas laser device, and electronic device manufacturing method | Electricity | 0 | Active |
| US6805975B2 | Steel sheet for procelain enameling and method for production thereof, and enameled product and method for production thereof | Emerging Cross-Sectional Technologies | 0 | Expired |
| US8813329B2 | Chamber replacing method | Emerging Cross-Sectional Technologies | 0 | Active |
| US9225139B2 | Discharge-pumped gas laser device | Electricity | 0 | Active |
| US8809821B2 | Holder device, chamber apparatus, and extreme ultraviolet light generation system | Electricity | 0 | Active |
| US9147993B2 | Master oscillator system and laser apparatus | Electricity | 0 | Active |
| US10495890B2 | Laser system or laser exposure system | Electricity | 0 | Active |
| US9507248B2 | Two-beam interference apparatus and two-beam interference exposure system | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.