Method of forming three-dimensional flash memory structure
US6136650A · kind A · utility
7Cited by
3References
14Claims
0Family size
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Key dates
| Filing date | Oct 21, 1999 |
| Grant date | Oct 24, 2000 |
| Priority date | — |
| Expiry date | Oct 21, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/201
Abstract
A three-dimensional flash array structure and the fabrication method thereof. The three-dimensional flash memory array structure disclosed in the invention can be expanded volumetrically, so that a memory cell with large capacity can be manufactured in a unit area to increase the memory capacity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.