Dilute composition cleaning method
US6136767A · kind A · utility
23Cited by
11References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 19, 1998 |
| Grant date | Oct 24, 2000 |
| Priority date | — |
| Expiry date | Nov 19, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/906
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A dilute composition cleaning method uses a cleaning composition including both phosphoric acid and acetic acid. Each of the acidic components may be at a concentration of less than about 10% by volume of a dilute composition. The dilute composition can be used for cleaning various surfaces, such as, for example, patterned metal layers and vias by exposing the surfaces to the dilute composition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.