Ultrasonic cleaning apparatus
US6138698A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 19, 1998 |
| Grant date | Oct 31, 2000 |
| Priority date | — |
| Expiry date | Nov 19, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An ultrasonic cleaning apparatus has an intermediate tank having a space divided into a liquid storing region (2a) and a liquid recovering region (2b) by a partition plate (5). An ultrasonic unit (3) is disposed in the bottom of the liquid storing region (2a). A vibration propagating liquid, such as pure water, is contained in the liquid storing region (2a) and a lower part of a cleaning tank (1) is immersed in the vibration propagating liquid stored in the liquid storing region (2a). The partition plate (5) is provided in its upper edge (5c) with a plurality of V-shaped notches (9). A nozzle pipe (4) provided with a plurality of nozzle holes (4a) is disposed in a side of the liquid storing region (2a) opposite a side in which the partition plate (5) is disposed. Pure water jetted by the nozzle pipe (4) toward the outer surface (1a) of the bottom wall of the cleaning tank (1) flows along the outer surface (1a) and overflows the partition plate (5) into the liquid recovering region (2b).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.