Shigenori Kitahara
22Patents
11h-index
25Co-inventors
75Inventor score
Filing activity: Aug 18, 1994 → Jan 24, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6029371A | Drying treatment method and apparatus | Electricity | 58 | Expired |
| US6009890A | Substrate transporting and processing system | Emerging Cross-Sectional Technologies | 42 | Expired |
| US5730162A | Apparatus and method for washing substrates | Emerging Cross-Sectional Technologies | 37 | Expired |
| US6299696A | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 30 | Expired |
| US5817185A | Method for washing substrates | Emerging Cross-Sectional Technologies | 25 | Expired |
| US5482068A | Cleaning apparatus | Emerging Cross-Sectional Technologies | 25 | Expired |
| US6138698A | Ultrasonic cleaning apparatus | Emerging Cross-Sectional Technologies | 24 | Expired |
| US6827814B2 | Processing apparatus, processing system and processing method | Electricity | 20 | Expired |
| US5911232A | Ultrasonic cleaning device | Performing Operations; Transporting | 18 | Expired |
| US6158447A | Cleaning method and cleaning equipment | Emerging Cross-Sectional Technologies | 16 | Expired |
| US6082381A | Treatment apparatus | Emerging Cross-Sectional Technologies | 11 | Expired |
| US6394110B2 | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 9 | Expired |
| US6203627A | Cleaning method | Electricity | 7 | Expired |
| US6592678B1 | Cleaning method and cleaning equipment | Emerging Cross-Sectional Technologies | 6 | Expired |
| US6253775A | Cleaning apparatus | Emerging Cross-Sectional Technologies | 5 | Expired |
| US6318386A | Treatment apparatus | Emerging Cross-Sectional Technologies | 4 | Expired |
| US7108003B2 | Ultrasonic cleaning apparatus | Emerging Cross-Sectional Technologies | 3 | Expired |
| US6293288A | Cleaning method and apparatus | Electricity | 3 | Expired |
| US9960069B2 | Joining device and joining system | Emerging Cross-Sectional Technologies | 2 | Active |
| US8491726B2 | Liquid processing apparatus and process liquid supplying method | Physics | 2 | Active |
| US8282744B2 | Substrate processing apparatus, substrate processing method, substrate processing program, and computer readable recording medium having substrate processing program therein | Electricity | 0 | Active |
| US9922859B2 | Joining device and joining system | General | 0 | Revoked |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.