Methods of depositing multilayer thin films
US6139906A · kind A · utility
5Cited by
10References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 7, 1999 |
| Grant date | Oct 31, 2000 |
| Priority date | — |
| Expiry date | Oct 7, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49044
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
This invention is directed to methods for depositing multilayered thin films onto substrates, for example in making thin film magnetic heads. In accordance with the invention a first film, such as Cr, is deposited onto the substrate at a first angle and a second layer, such as CoCrPt is deposited at a second angle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.