Inventor · Great Neck, NY, US

Hari Hegde

5Patents
5h-index
14Co-inventors
56Inventor score

Filing activity: Sep 9, 1998 → Oct 2, 2008

Most-cited inventions

PatentTitleAreaCited byStatus
US7183716B2 Charged particle source and operation thereof Electricity 25 Expired
US6545580B2 Electromagnetic field generator and method of operation Electricity 24 Expired
US6139906A Methods of depositing multilayer thin films Emerging Cross-Sectional Technologies 5 Expired
US6447839B1 Method of depositing multilayer thin films Emerging Cross-Sectional Technologies 5 Expired
US8703001B1 Grid assemblies for use in ion beam etching systems and methods of utilizing the grid assemblies Electricity 5 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.