Patent · US Expired

Method and apparatus for locating power plane shorts using polarized light microscopy

US6141093A · kind A · utility

17Cited by
4References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 25, 1998
Grant dateOct 31, 2000
Priority date
Expiry dateAug 25, 2018

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/311
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An apparatus and corresponding method for detecting, locating, or defining a short in a thin-film module. The apparatus includes a mechanical fixture supporting the module. A current source provides a current pulse to the module which produces a magnetic field and heating nearby the short which turns on and off as the pulsed current in the short turns on and off. Polarized light is directed onto the module, with an intermediate element disposed between the module and the source of the polarized light. The intermediate element may be a stress birefringent coating (e.g., a polyimide insulating layer) disposed on the module and onto which the polarized light is directed. The sample is rotated 0 to 45 degrees to maximize the birefringent effect. Alternatively, the intermediate element may be a magneto-optical Faraday rotator. A microscope is used to observe the module, facilitating identification of a short by the twisting of the polarization of the light as the short expands and shrinks in response to the heating or in response to the localized magnetic field. The preferred rotator is a composite having a garnet substrate, an iron garnet film disposed on the substrate, and a thin alum…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.