Positioning system
US6151100A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 11, 1997 |
| Grant date | Nov 21, 2000 |
| Priority date | — |
| Expiry date | Dec 11, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/7034
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A positioning system includes an X-Y table having a substrate holding surface for holding a substrate, the holding surface being movable in directions of X and Y axes, respectively, relative to a base table, a rotational table being rotationally movable about each of the X and Y axes and also being movable in a direction of a Z axis which is perpendicular to both of the X and Y axes, a controller for driving controlling the X-Y table and the rotational table and a storage device for storing, beforehand, information regarding rotation about the X or Y axis to be caused during motion of the X-Y table. The controller actuates the rotational table on the basis of the information stored in the storage device to correct rotation about the X or Y axis caused during motion of the X-Y table.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.