SOI with conductive metal substrate used as VSS connection
US6153912A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Oct 25, 1999 |
| Grant date | Nov 28, 2000 |
| Priority date | — |
| Expiry date | Oct 25, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/01
Abstract
An SOI transistor structure and SOI circuit is disclosed. The SOI transistor structure includes a conductive base layer and an insulating layer overlying the conductive base layer. A semiconductor layer overlies the insulating layer and includes a source region and a drain region therein with a channel region disposed therebetween. A conductive gate region overlies generally the channel region of the semiconductor layer. The SOI circuit includes a conductive base layer and an insulating layer overlying the conductive base layer. A semiconductor layer overlies the insulating layer. A first circuit structure and a second circuit structure are formed in a first region and second region of the semiconductor layer, respectively. A conductive contact region extends through the insulating layer and electrically connects at least one of the first circuit structure and the second circuit structure to the conductive base layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.