Patent · US Expired

SOI with conductive metal substrate used as VSS connection

US6153912A · kind A · utility

26Cited by
7References
19Claims
0Family size

Assignee

Inventor

Key dates

Filing dateOct 25, 1999
Grant dateNov 28, 2000
Priority date
Expiry dateOct 25, 2019

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D86/01

Abstract

An SOI transistor structure and SOI circuit is disclosed. The SOI transistor structure includes a conductive base layer and an insulating layer overlying the conductive base layer. A semiconductor layer overlies the insulating layer and includes a source region and a drain region therein with a channel region disposed therebetween. A conductive gate region overlies generally the channel region of the semiconductor layer. The SOI circuit includes a conductive base layer and an insulating layer overlying the conductive base layer. A semiconductor layer overlies the insulating layer. A first circuit structure and a second circuit structure are formed in a first region and second region of the semiconductor layer, respectively. A conductive contact region extends through the insulating layer and electrically connects at least one of the first circuit structure and the second circuit structure to the conductive base layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.