Process for producing a ceramic layer

US6156673A · kind A · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Frank Hintermaier · Hersbruck, DE
• Carlos Mazure-Espejo · Zorneding, DE

Key dates

• Filing date: Sep 30, 1998
• Grant date: Dec 5, 2000
• Expiry date: Sep 30, 2018

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C18/1208
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A ceramic layer, in particular having ferroelectric, dielectric or superconducting properties, uses compounds with a simple structure as precursors and only methanoic acid, acetic acid or propionic acid and, where appropriate, water as solvent.