Substrate treating apparatus
US6159291A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 10, 1998 |
| Grant date | Dec 12, 2000 |
| Priority date | — |
| Expiry date | Aug 10, 2018 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05B15/50
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A substrate treating apparatus for treating a substrate in a predetermined substrate treating region. Each holder arm is supported in a proximal end portion thereof by an arm support to be swingable about a pivotal axis. In time of substrate treatment, the arm support is raised by an air cylinder. With the ascent of the arm support, a cam follower attached to a proximal end of the holder arm is guided by a cam groove. The holder arm, while being raised, turns from a vertical standby posture to a horizontal posture for treating the substrate. As a result, a treating device attached to a distal end of the holder arm moves to a treating position. In the treating position, the treating device treats the substrate. The holder arms are maintained in the vertical standby posture when out of use in substrate treatment. Thus, the holder arms require a reduced standby space.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.