Apparatus for processing a substrate
US6161969A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 6, 1999 |
| Grant date | Dec 19, 2000 |
| Priority date | — |
| Expiry date | Oct 6, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus for processing a substrate, comprises a cassette station for loading and unloading a cassette storing a plurality of substrates, a sub-transfer arm mechanism arranged in the cassette station, for loading/unloading a substrate into/from the cassette, and a process station for processing a plurality of substrates unloaded from the cassette station, simultaneously in parallel, in which the process station comprises a front-stage station block adjoined to the cassette station and having a plurality of first process units for processing a substrate, a first main transfer arm mechanism arranged in the front-stage station block, for transferring a substrate to/from the sub-transfer arm mechanism and loading/unloading the substrate into/from the first process unit, a rear-stage station block adjoined to the front-stage station block and having a plurality of second process units for processing a substrate, and a second main transfer arm mechanism arranged in the rear-stage station block for transferring a substrate to/from the first main transfer arm mechanism and loading/unloading the substrate into/from the second process unit, a relative positional relationship between the …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.