Apparatus and method for ex-situ testing of performance parameters on an electrostatic chuck
US6163448A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 31, 1998 |
| Grant date | Dec 19, 2000 |
| Priority date | — |
| Expiry date | Jul 31, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6833
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus and method for ex-situ measurement of electrostatic chuck performance parameters and correlating ex-situ measurements to in-situ chuck performance. The apparatus comprises a probe, a fixture, a data acquisition system and a controller. The fixture secures a probe head in a substantially fixed position relative to the chuck. The apparatus coordinates measurements of the chuck surface potential as a function of time with the voltage applied to the chuck electrodes. The method comprises fixing the chuck and probe head to the fixture, measuring an ex-situ performance parameter of the chuck, such as surface potential, and comparing the measured parameter to a predetermined in-situ performance profile. The ex-situ performance parameter measurement can be measured as a function of time and/or coordinated with a change in the voltage applied to the chuck electrodes. By comparing the measured parameter to an ideal in-situ performance profile, the ex-situ measurement serves as a predictor of in-situ chuck behavior.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.