Gilbert Hausmann
19Patents
14h-index
23Co-inventors
74Inventor score
Filing activity: Jun 9, 1997 → May 18, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6475902B1 | Chemical vapor deposition of niobium barriers for copper metallization | Electricity | 327 | Expired |
| US6743473B1 | Chemical vapor deposition of barriers from novel precursors | Electricity | 309 | Expired |
| US6099697A | Method of and apparatus for restoring a support surface in a semiconductor wafer processing system | Electricity | 287 | Expired |
| US7984714B2 | Managing obstructive sleep apnea and/or snoring using local time released agents | Human Necessities | 187 | Active |
| US5886866A | Electrostatic chuck having a combination electrode structure for substrate chucking, heating and biasing | Emerging Cross-Sectional Technologies | 66 | Expired |
| US8219170B2 | System and method for practicing spectrophotometry using light emitting nanostructure devices | Physics | 48 | Active |
| US6219219A | Cathode assembly containing an electrostatic chuck for retaining a wafer in a semiconductor wafer processing system | Electricity | 32 | Expired |
| US6104596A | Apparatus for retaining a subtrate in a semiconductor wafer processing system and a method of fabricating same | Emerging Cross-Sectional Technologies | 30 | Expired |
| US6057244A | Method for improved sputter etch processing | Electricity | 27 | Expired |
| US5880923A | Method and apparatus for improved retention of a semiconductor wafer within a semiconductor wafer processing system | Emerging Cross-Sectional Technologies | 23 | Expired |
| US6117246A | Conductive polymer pad for supporting a workpiece upon a workpiece support surface of an electrostatic chuck | Electricity | 21 | Expired |
| US6215640A | Apparatus and method for actively controlling surface potential of an electrostatic chuck | Electricity | 20 | Expired |
| US8365730B2 | Method and system for classification of photo-plethysmographically detected respiratory effort | Human Necessities | 20 | Active |
| US6067222A | Substrate support apparatus and method for fabricating same | Emerging Cross-Sectional Technologies | 17 | Expired |
| US6163448A | Apparatus and method for ex-situ testing of performance parameters on an electrostatic chuck | Electricity | 7 | Expired |
| US6908865B2 | Method and apparatus for cleaning substrates | Electricity | 5 | Expired |
| US9044558B2 | Method and system for classification of photo-plethysmographically detected respiratory effort | Human Necessities | 4 | Active |
| US6547934B2 | Reduction of metal oxide in a dual frequency etch chamber | Electricity | 3 | Expired |
| US10532170B2 | Method and system for classification of photo-plethysmographically detected respiratory effort | Human Necessities | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.