Multilayer ferroelectric capacitor structure
US6172385A · kind A · utility
122Cited by
3References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 30, 1998 |
| Grant date | Jan 9, 2001 |
| Priority date | — |
| Expiry date | Oct 30, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02197
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Multilayer ferroelectric capacitor structures comprising a ferroelectric film having a combination of different ferroelectric materials or compositions such as strontium bismuth tantalate, strontium bismuth niobate, bismuth titanate, strontium bismuth tantalate niobate, lead zirconate titanate, lead lanthanum zirconate titanate are disclosed. A method of preparing the multilayer ferroelectric film containing at least two different ferroelectric materials and/or more than one composition of ferroelectric material is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.