Optical inspection method and apparatus
US6175645A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 22, 1998 |
| Grant date | Jan 16, 2001 |
| Priority date | — |
| Expiry date | Jan 22, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/8806
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and an apparatus for an optical inspection of an object, having upper and lower faces, so as to detect defects existing on the object. First and second beams of an incident radiation are produced and directed onto the object. A light component of the first incident beam, which is reflected from one face of the object, and a light component of the second incident beam, which is transmitted through the upper and lower faces of the object, are simultaneously sensed. First and second images, formed, respectively by reflected and transmitted light components are acquired and analyzed so as to provide data indicative of the defects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.