On track coater unit cup set
US6179915A · kind A · utility
Assignees
Inventor
Key dates
| Filing date | Mar 13, 1999 |
| Grant date | Jan 30, 2001 |
| Priority date | — |
| Expiry date | Mar 13, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A track coater unit cup set for using in a wafer spin coating process comprises a hollow concave circular base cup, a hollow convex circular inner cup, and a hollow convex circular outer cup. The base cup has an inner circular groove with an inner groove wall and an eccentric outer circular groove with an outer circular groove wall. The inner cup capable of resting upon the base cup by engaging a downward protruding ring with the inner groove wall of the base cup on a meshing interface in between. The outer cup for shielding above top of the inner cup and capable of resting upon the base cup has a central top opening and a ring of inward tip extruding downward from an edge of the outer cup for forming the top opening. A stall-flow region is defined between the inward tip and adjacent insides of the outer cup. The meshing interface further includes at least a set of anchoring means for avoiding relative slipping between the base cup and the inner cup. The outer cup further includes disturbing means in the stall-flow region for altering air flow thereinside.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.