Silicon article having columns and method of making
US6187412A · kind A · utility
7Cited by
14References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 27, 1997 |
| Grant date | Feb 13, 2001 |
| Priority date | — |
| Expiry date | Jun 27, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24917
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A silicon article including a silicon base and columns extending from the silicon base. The columns define a gap between the columns which is devoid of material so that the article can act as a filter or heat sink. Also disclosed is a method of making the silicon article.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.