Thermal processor and components thereof
US6191388A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 18, 1998 |
| Grant date | Feb 20, 2001 |
| Priority date | — |
| Expiry date | Nov 18, 2018 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B31/16
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An injector system for a vertical furnace which has a pedestal and a semiconductor article support within a process container. The injector system includes an injector which is an elongate tube extending into the process chamber. The tube includes a circuitous section in the area of the pedestal to increase residence time for the contents of the tube prior to introduction to the semiconductor articles. A substantially direct section leads from the circuitous section to a discharge end located above the semiconductor article support. The injector system further includes a vertical column heater arranged with the vapor outlet at the upper end of the heater connected via a coupling to the injector in an arrangement to reduce thermal loss.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.