Gregory J. Wilson
99Patents
13h-index
82Co-inventors
87Inventor score
Filing activity: May 5, 1992 → Oct 25, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6565729B2 | Method for electrochemically depositing metal on a semiconductor workpiece | Emerging Cross-Sectional Technologies | 328 | Expired |
| US6428673B1 | Apparatus and method for electrochemical processing of a microelectronic workpiece, capable of modifying processing based on metrology | Chemistry; Metallurgy | 56 | Expired |
| US6471913B1 | Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperature | Electricity | 44 | Expired |
| US6660137B2 | System for electrochemically processing a workpiece | Emerging Cross-Sectional Technologies | 43 | Expired |
| US8491742B2 | Method for embossing an absorbent article using a segmented anvil | Emerging Cross-Sectional Technologies | 33 | Active |
| US8496775B2 | Method for embossing an absorbent article | Emerging Cross-Sectional Technologies | 32 | Active |
| US6569297B2 | Workpiece processor having processing chamber with improved processing fluid flow | Emerging Cross-Sectional Technologies | 23 | Expired |
| US6921467B2 | Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces | Electricity | 17 | Expired |
| US7102763B2 | Methods and apparatus for processing microelectronic workpieces using metrology | Electricity | 15 | Expired |
| US7247223B2 | Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpieces | Chemistry; Metallurgy | 14 | Expired |
| US7857958B2 | Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpieces | Chemistry; Metallurgy | 14 | Active |
| US7931786B2 | Apparatus and method for agitating liquids in wet chemical processing of microfeature workpieces | Chemistry; Metallurgy | 13 | Active |
| US8496790B2 | Electrochemical processor | Chemistry; Metallurgy | 13 | Active |
| US7371998B2 | Thermal wafer processor | Electricity | 13 | Active |
| US7332066B2 | Apparatus and method for electrochemically depositing metal on a semiconductor workpiece | Emerging Cross-Sectional Technologies | 12 | Expired |
| US7160421B2 | Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece | Emerging Cross-Sectional Technologies | 12 | Expired |
| US6780374B2 | Method and apparatus for processing a microelectronic workpiece at an elevated temperature | Electricity | 11 | Expired |
| US7390382B2 | Reactors having multiple electrodes and/or enclosed reciprocating paddles, and associated methods | Electricity | 11 | Expired |
| US9994376B2 | Package comprising a plurality of individually wrapped articles | Performing Operations; Transporting | 10 | Active |
| US7390383B2 | Paddles and enclosures for enhancing mass transfer during processing of microfeature workpieces | Electricity | 10 | Expired |
| US6191388A | Thermal processor and components thereof | Chemistry; Metallurgy | 8 | Expired |
| US8496789B2 | Electrochemical processor | Chemistry; Metallurgy | 8 | Active |
| US7393439B2 | Integrated microfeature workpiece processing tools with registration systems for paddle reactors | Chemistry; Metallurgy | 8 | Expired |
| US7189318B2 | Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece | Chemistry; Metallurgy | 8 | Expired |
| US7161689B2 | Apparatus and method for processing a microelectronic workpiece using metrology | Electricity | 7 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.