Method for reducing aliasing effects in scanning beam microscopy
US6194718A · kind A · utility
9Cited by
6References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 23, 1998 |
| Grant date | Feb 27, 2001 |
| Priority date | — |
| Expiry date | Sep 23, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/222
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for reducing aliasing effects in scanning beam microscopy, comprises generating a plurality of successive images of the same object, wherein each image is shifted in the vertical direction with respect to the preceding one by a sub-pixel distance and then averaging all the images together.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.