SEM image enhancement using narrow band detection and color assignment
US6201240A · kind A · utility
33Cited by
7References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 4, 1998 |
| Grant date | Mar 13, 2001 |
| Priority date | — |
| Expiry date | Nov 4, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/222
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Disclosed is a system and method for enhancing edge, topography, and materials in SEM images. The enhancements are achieved by collecting secondary electrons at narrow energy bands. This allows construction of various "primary" images having specific features enhanced. Further enhancement is achieved by various manipulations and combinations of the "primary" images to obtain a final enhanced image. Yet further enhancements are achieved by assigning color to various "primary" images before constructing the final image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.