Patent · US Expired

Non-contact electrical conduction measurement for insulating films

US6202029A · kind A · utility

64Cited by

14References

10Claims

0Family size

Inventors

Roger L. Verkuil · Poughkeepsie, US
Gregory S. Horner · Santa Clara, US
Tom Miller · Portland, US

Key dates

Filing date	Jun 20, 2000
Grant date	Mar 13, 2001
Priority date	—
Expiry date	Jun 20, 2020

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2648
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A corona source is used to apply charge to an insulating layer. The resulting voltage over time is used to determine the current through the layer. The resulting data determines a current-voltage characteristic for the layer and may be used to determine the tunneling field for the layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.