Integration of high K spacers for dual gate oxide channel fabrication technique
US6207485A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 5, 1998 |
| Grant date | Mar 27, 2001 |
| Priority date | — |
| Expiry date | Jan 5, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/693
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor device has gate with a first material having a first dielectric constant adjacent the semiconductor substrate and a second material having a second dielectric constant adjacent the semiconductor substrate. A conductor, such as polysilicon, is then placed on the gate so that the first and second materials are sandwiched between the conductor and the semiconductor substrate. Since the dielectric constants of the two materials are different, the gate acts like a gate having a single dielectric with at least two thicknesses. This is due to the fact that each material has a dielectric constant that is different. One dielectric constant is larger than the other dielectric constant. The higher dielectric constant material is comprised of two spacers at the sidewalls of the gate. A layer of silicon dioxide is positioned on the semiconductor substrate between the spacers. The thickness of the spacers can be adjusted to optimize the performance of the semiconductor device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.