Cluster tool
US6208751A · kind A · utility
59Cited by
4References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 24, 1998 |
| Grant date | Mar 27, 2001 |
| Priority date | — |
| Expiry date | Mar 24, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67778
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A cluster tool for testing substrates and locating defects on the substrates utilizing a plurality of tools coupled via an automation platform. The cluster tool includes an interface receiving storage device(s) having, each, more than one substrate contained therein. An inspection tool capable of inspecting the substrates and delivering defect map indicative of suspected locations on each of the substrates. The automation platform is coupled to the interface to the inspection tool, and to a review tool, and is capable of transferring substrates between the tools.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.