Integrated angular speed sensor device and production method thereof
US6209394A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 23, 1998 |
| Grant date | Apr 3, 2001 |
| Priority date | — |
| Expiry date | Oct 23, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/764
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An angular speed sensor comprises a pair of mobile masses which are formed in an epitaxial layer and are anchored to one another and to the remainder of the device by anchorage elements. The mobile masses are symmetrical with one another, and have first mobile excitation electrodes which are intercalated with respective first fixed excitation electrodes and second mobile detection electrodes which are intercalated with second fixed detection electrodes. The first mobile and fixed excitation electrodes extend in a first direction and the second mobile and fixed detection electrodes extend in a second direction which is perpendicular to the first direction and is disposed on a single plane parallel to the surface of the device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.