Method of producing a contact structure
US6218203A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 28, 1999 |
| Grant date | Apr 17, 2001 |
| Priority date | — |
| Expiry date | Jun 28, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of producing a contact structure for achieving an electrical connection with a contact target. The contact structure includes a contactor formed on a planar surface of a substrate by a microfabrication technology. In one aspect, the production method involves a plastic molding technology. In another aspect, the production method involves a photolithography technology using a gray-tone photomask. The contactor has at least a horizontal portion formed on the substrate and a contact portion formed on one end of the horizontal portion. A spring force of the horizontal portion of the contactor provides a contact force when the contactor is pressed against the contact target. In a further aspect, the contact structure includes a recess for providing a free space for the contactor when the contactor is pressed against the contact target.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.