Elastomeric sliding seal for vacuum bellows
US6231054A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 21, 1998 |
| Grant date | May 15, 2001 |
| Priority date | — |
| Expiry date | Dec 21, 2018 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16J3/047
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An improved bellows assembly (18) is provided for use in, for example, an ion implanter (10). The bellows assembly comprises a first mounting portion (56) located at one end of the bellows assembly for fixedly mounting the bellows assembly to a first vacuum chamber (16); a second mounting portion (54) located at an opposite end of the bellows assembly for slidably mounting the bellows assembly to a second vacuum chamber (15); and a steel bellows (60) located between the first and second mounting portions. The bellows extends generally along a longitudinal axis (64) and is expansible and contractible along this axis. The second mounting portion permits radial slidable movement of the bellows assembly with respect to the second chamber in a first plane substantially perpendicular to this axis. The second mounting portion comprises a first sliding plate (74) having a first wear plate (78), a second sliding plate (76) having a second wear plate (80), and an elastomeric seal (82) for maintaining a vacuum condition at the slidable mating surface provided between the first and second wear plates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.