Method of forming a shallow trench isolation structure
US6238996A · kind A · utility
11Cited by
5References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 25, 1999 |
| Grant date | May 29, 2001 |
| Priority date | — |
| Expiry date | Jan 25, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/76232
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
This invention provides a concave shallow trench isolation structure, and a fabricating method of a shallow trench isolation structure with concave bottom corners. The concave shape of the structure prevents stress centralization, and avoids leakage current or punch through in the source/drain regions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.