Removable cover for protecting a reticle, system including and method of using the same
US6239863A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 29, 1999 |
| Grant date | May 29, 2001 |
| Priority date | — |
| Expiry date | Dec 29, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67369
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A removable cover for protecting a reticle used in a lithography system is described. The removable cover includes a frame and a membrane supported by the frame. The membrane is transparent to an inspection wavelength such that the reticle can be inspected with the removable cover in place. This removable cover protects the reticle when the removable cover is in place and is removable for lithographic exposure. The removable cover can further include at least one reticle fastener that applies force to the reticle thereby preventing movement of the removable cover relative to the reticle when the removable cover is in place. A plurality of fasteners are used to position and secure the removable cover and reticle. A method of performing lithography and a lithographic system are also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.