Eric Brian Catey
12Patents
3h-index
25Co-inventors
56Inventor score
Filing activity: Dec 29, 1999 → Oct 26, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6239863A | Removable cover for protecting a reticle, system including and method of using the same | Electricity | 50 | Expired |
| US8189203B2 | Reticle inspection systems and method | Physics | 4 | Active |
| US7525641B2 | System and method for uniformity correction | Physics | 3 | Active |
| US9046754B2 | EUV mask inspection system | Physics | 2 | Active |
| US9041903B2 | Mask inspection with fourier filtering and image compare | Physics | 2 | Active |
| US9285687B2 | Inspection apparatus, lithographic apparatus, and device manufacturing method | Physics | 2 | Active |
| US8064148B2 | High numerical aperture catadioptric objectives without obscuration and applications thereof | Emerging Cross-Sectional Technologies | 1 | Active |
| US10928738B2 | Adaptive filter for in-line correction | Physics | 0 | Active |
| US8623576B2 | Time differential reticle inspection | Physics | 0 | Active |
| US10481507B2 | Measurement method comprising in-situ printing of apparatus mark and corresponding apparatus | Physics | 0 | Active |
| US8259398B2 | High numerical aperture catadioptric objectives without obscuration and applications thereof | Emerging Cross-Sectional Technologies | 0 | Active |
| US10895813B2 | Lithographic cluster, lithographic apparatus, and device manufacturing method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.