Integrated circuit capacitor including tapered plug

US6249016A · kind A · utility

Assignee

• Agere Systems Guardian Corporation · US

Inventors

• Samir Chaudhry · Orlando, US
• Sundar Srinivasan Chetlur · Singapore, SG
• Nace Layadi · Orlando, US
• Pradip K. Roy · Orlando, US
• Hem M. Vaidya · Orlando, US

Key dates

• Filing date: Jul 30, 1999
• Grant date: Jun 19, 2001
• Expiry date: Jul 30, 2019

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D1/68

Abstract

An integrated circuit capacitor includes a first dielectric layer adjacent a substrate and having a trench therein, and a metal plug comprising an upper portion extending upwardly into the trench, and a lower portion disposed in the first dielectric layer. The lower portion has a tapered width which increases in a direction toward the substrate to thereby secure the metal plug in the dielectric layer. Preferably, the upper portion is also tapered. Furthermore, a second dielectric layer is adjacent the metal plug with an upper electrode thereon.