Method of mapping a surface using a probe for stylus nanoprofilometry having a non-circular cross-section
US6250143A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 31, 1999 |
| Grant date | Jun 26, 2001 |
| Priority date | — |
| Expiry date | Aug 31, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/878
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides an apparatus and a method of manufacturing that apparatus. More specifically, to a method of manufacturing probes for a stylus nanoprofilometer having a non-circular probe tip geometry and a method of measurement of semiconductor wafer features using the same. In one embodiment, the probe comprises an upper portion couplable to the stylus nanoprofilometer and a probative portion coupled to the upper portion. The probative portion has a cross section that is substantially thinner than a cross section of the upper portion. The probative portion further has a terminus distal the upper portion and a reentrant angle from the terminus to the upper portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.