Larry E. Plew
13Patents
6h-index
17Co-inventors
55Inventor score
Filing activity: Sep 15, 1997 → Nov 25, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6250143A | Method of mapping a surface using a probe for stylus nanoprofilometry having a non-circular cross-section | Emerging Cross-Sectional Technologies | 34 | Expired |
| US6651226B2 | Process control using three dimensional reconstruction metrology | Physics | 17 | Expired |
| US5804460A | Linewidth metrology of integrated circuit structures | Emerging Cross-Sectional Technologies | 12 | Expired |
| US6405584B1 | Probe for scanning probe microscopy and related methods | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6246060A | Apparatus for holding and aligning a scanning electron microscope sample | Electricity | 6 | Expired |
| US6727720B2 | Probe having a microstylet | Emerging Cross-Sectional Technologies | 6 | Expired |
| US6714892B2 | Three dimensional reconstruction metrology | Emerging Cross-Sectional Technologies | 6 | Expired |
| US6606371B2 | X-ray system | Physics | 4 | Expired |
| US6577970B2 | Method of determining a crystallographic quality of a material located on a substrate | Physics | 3 | Expired |
| US6695572B2 | Method and apparatus for minimizing semiconductor wafer contamination | Electricity | 1 | Expired |
| US6425189B1 | Probe tip locator having improved marker arrangement for reduced bit encoding error | Emerging Cross-Sectional Technologies | 0 | Expired |
| US6534851B1 | Modular semiconductor substrates | Electricity | 0 | Expired |
| US6713409B2 | Semiconductor manufacturing using modular substrates | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.