Differential pulsed laser beam probing of integrated circuits
US6252222A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2000 |
| Grant date | Jun 26, 2001 |
| Priority date | — |
| Expiry date | Jan 13, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/308
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A laser beam is used to probe an integrated circuit device under test. A single laser provides a single laser pulse which is divided into two pulses, both of which are incident upon the device under test. After the two pulses interact with the device under test, the two pulses are separated and detected by two photo detectors. The electrical signals output by the photo detectors are then subtracted, which cancels out any common mode noise induced on both pulses including noise due to mechanical vibration of the device under test and also any noise from the laser. The difference signal can be used to reproduce a time varying signal in the device under test.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.