Adhesion of silicon carbide films
US6252295A · kind A · utility
34Cited by
9References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 19, 2000 |
| Grant date | Jun 26, 2001 |
| Priority date | — |
| Expiry date | Jun 19, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The adhesion of a silicon carbide containing film to a surface is enhanced by employing a transition film of silicon nitride, silicon dioxide and/or silicon oxynitride.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.