Stage for charged particle microscopy system
US6252705A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 25, 1999 |
| Grant date | Jun 26, 2001 |
| Priority date | — |
| Expiry date | May 25, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/20278
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A stage assembly for holding a work-piece in a charged particle microscopy system includes a magnetic motor (e.g., brushless linear servo motor) for driving an X-platform riding on a base along the X axis, a non-magnetic linear motor (e.g., piezoelectric motor) for driving a Y-platform riding on the X-platform along the Y axis, and a non-magnetic rotary motor (e.g., piezoelectric motor) for rotating a rotary platform over the Y-platform, wherein the duty cycle of the magnetic motor is substantially greater than the duty cycle of the non-magnetic linear and rotary motors. This along with the particular arrangement of the motors and the platforms yields a compact, durable, and vacuum compatible stage which has minimal mechanical vibrations, minimal interference with the charged particle microscope, minimal particle generation, and high speed area coverage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.