Methods for controlling an RF matching network
US6259334A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 22, 1998 |
| Grant date | Jul 10, 2001 |
| Priority date | — |
| Expiry date | Dec 22, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H7/40
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Disclosed are methods and devices for tuning an impedance matching network to a tune point where power reflection is at a minimum. The impedance matching network is coupled between an rf generator and a load to transmit rf power to the load. The impedance matching network includes a set of variable impedance elements. The method includes measuring a network impedance value of the impedance matching network including the load at current values of the variable impedance elements. The method further includes computing directions (i.e., increasing or decreasing) and relative rates of change for the variable impedance element values in response to the network impedance of the network such that the directions and relative rates of change for the variable impedance elements are adapted to change the reflected power in the direction of the most rapid decrease in reflected power. In addition, the method includes driving the variable impedance elements by adjusting the variable impedance elements in the computed directions by the computed relative rates of change such that the variable impedance elements are driven to new current values in the direction of the most rapid decrease in reflecte…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.