Arthur M. Howald
53Patents
16h-index
33Co-inventors
84Inventor score
Filing activity: Nov 14, 1978 → Feb 13, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7086347B2 | Apparatus and methods for minimizing arcing in a plasma processing chamber | Electricity | 358 | Expired |
| US7611640B1 | Minimizing arcing in a plasma processing chamber | Electricity | 347 | Active |
| US6125025A | Electrostatic dechucking method and apparatus for dielectric workpieces in vacuum processors | Emerging Cross-Sectional Technologies | 98 | Expired |
| US7480571B2 | Apparatus and methods for improving the stability of RF power delivery to a plasma load | Electricity | 80 | Expired |
| US6259334A | Methods for controlling an RF matching network | Electricity | 63 | Expired |
| US6876155B2 | Plasma processor apparatus and method, and antenna | Electricity | 50 | Expired |
| US7218503B2 | Method of determining the correct average bias compensation voltage during a plasma process | Emerging Cross-Sectional Technologies | 48 | Expired |
| US6265831A | Plasma processing method and apparatus with control of rf bias | Electricity | 37 | Expired |
| US6441555B1 | Plasma excitation coil | Electricity | 36 | Expired |
| US10469108B2 | Systems and methods for using computer-generated models to reduce reflected power towards a high frequency RF generator during a cycle of operations of a low frequency RF generator | Electricity | 34 | Active |
| US9779196B2 | Segmenting a model within a plasma system | Physics | 33 | Active |
| US6646385B2 | Plasma excitation coil | Electricity | 24 | Expired |
| US9720022B2 | Systems and methods for providing characteristics of an impedance matching model for use with matching networks | Electricity | 19 | Active |
| US6074516A | High sputter, etch resistant window for plasma processing chambers | Electricity | 18 | Expired |
| US6838832B1 | Apparatus and methods for improving the stability of RF power delivery to a plasma load | Electricity | 17 | Expired |
| US6965506B2 | System and method for dechucking a workpiece from an electrostatic chuck | Electricity | 16 | Expired |
| US7196896B2 | Dechucking method and apparatus for workpieces in vacuum processors | Electricity | 15 | Expired |
| US6790375B1 | Dechucking method and apparatus for workpieces in vacuum processors | Electricity | 15 | Expired |
| US9711332B2 | Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generator | Electricity | 14 | Active |
| US4186508A | Line guide for fishing rod | Emerging Cross-Sectional Technologies | 13 | Expired |
| US8241701B2 | Processes and systems for engineering a barrier surface for copper deposition | Electricity | 11 | Active |
| US9831071B2 | Systems and methods for using multiple inductive and capacitive fixtures for applying a variety of plasma conditions to determine a match network model | Physics | 9 | Active |
| US9837252B2 | Systems and methods for using one or more fixtures and efficiency to determine parameters of a match network model | Electricity | 9 | Active |
| US6842147B2 | Method and apparatus for producing uniform processing rates | Electricity | 8 | Expired |
| US6400458B1 | Interferometric method for endpointing plasma etch processes | Electricity | 8 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.